Westwood, William D
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Sputter deposition (AVS Education Committee book series)
Tantalum thin films
Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions
Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
Handbook Of Thin Film Process Technology 98/2 Recipes For Optical Materials
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